DS-3H Pneumatic-type Springless diaphragm Stainless Valve

DS-3H

We recommend and provide Top-of the-line performance with Superb quality Cylinder Valve from NERIKI.
Manufacturer information, visit: www.neriki.com


Feature:

- 2X10^-10 sealing integrity
- Springless diaphragm design Particle-free & minimum dead space
- Normally closed position
- Gland section with double-seal structure
- Recessed Pressure Relief Device
- DISS outlet is available
- Open/Close indication is available as an option
- The off-set radius of the valve allows usage of a standard cylinder neck-ring and cap - therefore a non negligible cost saving feature
- Purgeable seat design (DSP-3H) is also available
This feature greatly reduces the time necessary for purging,
as you can simply connect to the purging line,
and initiate purging.
This feature is recommended for corrosive gases,
as you are able to keep the inside clean, preventing rust from premature attacks on the materials.

Valve for the manufacturing of Semiconductors/LCD/Solar panel Contaminant-free gas for manufacturing
In the field of semiconductors, various high purity gases are used at each manufacturing stage, e.g. in the formation of oxide film and dry etching, and as the ambient gas for single crystal culture. For the manufacturing of super-LSI through hyperfine processing with submicron accuracy, clean stainless-steel valves are used which produce no micro-dust, moisture content or oil. These stainless-steel valve greatly enhance product yield.

Neriki is able to deliver product in three different kinds of grade upon your preference;
Grade Surface roughness at gas wetted surface Cleansing method Assembly Seal test Pressure test Packing
Grade 20 Rmax below 0.8micrometer DI water Clean room(Class10) High purity Nitrogen, Snoop testing or by Helium leak detector High purity Nitrogen, pressured snoop testing Clean packed with high purity Nitrogen filled
Grade 25 Rmax below 1.0micrometer DI water
Grade 30 Rmax below 4.0micrometer Organic Solvent

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