DST-1 Tied Diaphragm Manual Operating Valve for Semiconductor industry

We recommend and provide Top-of the-line performance with Superb quality Cylinder Valve from NERIKI.
Manufacturer information, visit: www.neriki.com

1.Ultra Clean
- Tied-Diaphragm design
- Particle-free & Dead-space free
- Assembled, Leak test and packaging are all performed in a class 10 clean room

2.Key Features
- High Flow rate
- Purge performance is improved
- Seat Cassette is replaceable easily

3. Safety
- Double Sealed design in gland nut part

Valve for the manufacturing of Semiconductors/LCD/Solar panel Contaminant-free gas for manufacturing
In the field of semiconductors, various high purity gases are used at each manufacturing stage, e.g. in the formation of oxide film and dry etching, and as the ambient gas for single crystal culture. For the manufacturing of super-LSI through hyperfine processing with submicron accuracy, clean stainless-steel valves are used which produce no micro-dust, moisture content or oil. These stainless-steel valve greatly enhance product yield.

Neriki is able to deliver product in three different kinds of grade upon your preference;
Grade	Surface roughness at gas wetted surface	Cleansing method	Assembly	Seal test	Pressure test	Packing
Grade 20	Rmax below 0.8micrometer	DI water	Clean room(Class10)	High purity Nitrogen, Snoop testing or by Helium leak detector	High purity Nitrogen, pressured snoop testing	Clean packed with high purity Nitrogen filled
Grade 25	Rmax below 1.0micrometer	DI water
Grade 30	Rmax below 4.0micrometer	Organic Solvent

CV Value ・For Use: 0.6
・For Filling: 0.6
・Maximum service pressure: 20.00Mpa (200Bar)

Questionnaire download

Inquiry
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